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Stability studies of ultrashallow junction formed by low energy boron implant and spike annealing
Lin Shao, Xuemei Wang, Irene Rusakova, Hui Chen, Jiarui Liu, Joe Bennett, Larry Larson, Jianyue Jin, P. A W Van Der Heide, Wei Kan Chu
Research output: Contribution to journal › Article › peer-review
9
Scopus
citations