@inproceedings{e135ad0ddb55451f8ea7117fc7a65dee,
title = "Nanogap experiments for laser cooling - A progress report",
abstract = "One of the challenges of laser cooling a semiconductor is the typically high index of refraction (greater than 3), which limits efficient light output of the upconverted photon. This challenge is proposed to be met with a novel concept of coupling the photon out via a thin, thermally insulating vacuum gap that allows light to pass efficiently by frustrated total internal reflection. This study has the goal of producing a test structure that allows investigation of heat transport across a {"}nanogap{"} consisting of a thin film supported over a substrate by an array of nanometer-sized posts. The nanogap is fabricated monolithically by first creating a film of SiO2 on a silicon substrate, lithographically defining holes in the SiO2, and covering this structure including the holes with silicon. Selective lateral etching will then remove the SiO2, leaving behind a thin gap between two Si layers spaced apart by nanometer-scale Si posts. Demonstration of this final step by successfully undercutting the a-Si upper layer due to the hydrophobic nature of silicon and the slow etch rate of buffered oxide etch in the small gap has proved to be problematic. Arriving at a feasible solution to this conundrum is the current objective of this project in order to begin investigating the thermal conductivity properties of the structure.",
keywords = "Frustrated internal reflection, Laser cooling, MEMS technology",
author = "Martin, {Ryan P.} and Josef Velten and Andreas Stintz and Malloy, {Kevin J.} and Epstein, {Richard I.} and Mansoor Sheik-Bahae and Hasselbeck, {Michael P.} and Babak Imangholi and Boyd, {S. T.P.} and Bauer, {Todd M.}",
year = "2007",
doi = "10.1117/12.708585",
language = "English (US)",
isbn = "0819465747",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Laser Cooling of Solids",
note = "Laser Cooling of Solids ; Conference date: 24-01-2007 Through 25-01-2007",
}